Package structure

ABSTRACT

A package structure is provided. The package structure includes a waveguide, a passivation layer, and a reflector. The waveguide is over a substrate. The passivation layer is over the substrate and covers the waveguide. The reflector includes a metal layer and a semiconductor layer on the passivation layer. The metal layer and the first semiconductor layer are in contact with the passivation layer.

CROSS REFERENCE TO RELATED APPLICATIONS

This Application is a continuation application of application Ser. No.17/197,788, filed on Mar. 10, 2021, which is a continuation applicationof application Ser. No. 16/874,219, filed on May 14, 2020, which is adivisional application of application Ser. No. 16/230,652, filed on Dec.21, 2018, which claims the benefit of U.S. Provisional Application No.62/752,683 filed on Oct. 30, 2018, and entitled “Package structure andmethod for forming the same”, the entirety of which is incorporated byreference herein.

BACKGROUND

Optical signals are used for secure, high-speed data transmissionbetween two devices. In some applications, a device capable of opticaldata transmission includes at least one integrated circuit (IC) or achip having an optical component for transmitting and/or receivingoptical signals. Also, the device usually has one or more other opticalor electronic components (e.g. transistors), a waveguide for controllingthe propagation of the optical signals from one component to another,and a carrier, such as a substrate of a printed circuit board (PCB), onwhich the chip equipped with the optical component and the one or moreother components are mounted. Various approaches for mounting a chipequipped with an optical component on a substrate have been studied.

BRIEF DESCRIPTION OF THE DRAWINGS

Aspects of the present disclosure are best understood from the followingdetailed description when read with the accompanying figures. It shouldbe noted that, in accordance with the standard practice in the industry,various features are not drawn to scale. In fact, the dimensions of thevarious features may be arbitrarily increased or reduced for clarity ofdiscussion.

FIGS. 1A-1B are cross-sectional representations of various stages offorming a first portion of a reflector, in accordance with someembodiments of the disclosure.

FIGS. 2A-2D are cross-sectional representations of various stages offorming a second portion of a reflector, in accordance with someembodiments of the disclosure.

FIGS. 3A-3D are cross-sectional representations of various stages offorming a reflector, in accordance with some embodiments of thedisclosure.

FIGS. 4A-4D are cross-sectional representations of various stages offorming a package structure, in accordance with some embodiments of thedisclosure.

FIG. 4E shows an application of the package structure of FIG. 4D, inaccordance with some embodiments of the disclosure.

FIG. 5 is a cross-sectional representation of a modified reflector, inaccordance with some embodiments of the disclosure.

FIG. 6 shows an application of a modified package structure, inaccordance with some embodiments of the disclosure.

FIGS. 7A and 7B are perspective representations of a space in a packagestructure, in accordance with some embodiments of the disclosure.

FIGS. 8A-8D are cross-sectional representations of various stages offorming a modified first portion of a reflector, in accordance with someembodiments of the disclosure.

FIG. 8E is a cross-sectional representation of a modified reflector, inaccordance with some embodiments of the disclosure.

FIG. 9 shows an application of a modified package structure, inaccordance with some embodiments of the disclosure.

FIG. 10 is a cross-sectional representation of a modified reflector, inaccordance with some embodiments of the disclosure.

FIG. 11 shows an application of a modified package structure, inaccordance with some embodiments of the disclosure.

FIG. 12 is a cross-sectional representation of a modified reflector, inaccordance with some embodiments of the disclosure.

FIG. 13 shows an application of a modified package structure, inaccordance with some embodiments of the disclosure.

DETAILED DESCRIPTION

The following disclosure provides many different embodiments, orexamples, for implementing different features of the subject matterprovided. Specific examples of components and arrangements are describedbelow to simplify the present disclosure. These are, of course, merelyexamples and are not intended to be limiting. For example, the formationof a first feature over or on a second feature in the description thatfollows may include embodiments in which the first and second featuresare formed in direct contact, and may also include embodiments in whichadditional features may be formed between the first and second features,such that the first and second features may not be in direct contact. Inaddition, the present disclosure may repeat reference numerals and/orletters in the various examples. This repetition is for the purpose ofsimplicity and clarity and does not in itself dictate a relationshipbetween the various embodiments and/or configurations discussed.

Some variations of the embodiments are described. Throughout the variousviews and illustrative embodiments, like reference numbers are used todesignate like elements. It should be understood that additionaloperations can be provided before, during, and after the method, andsome of the operations described can be replaced or eliminated for otherembodiments of the method.

Other features and processes may also be included. For example, testingstructures may be included to aid in the verification testing of thethree-dimensional (3D) packaging or 3D IC devices. The testingstructures may include, for example, test pads formed in aredistribution layer or on a substrate that allows the testing of the 3Dpackaging or 3D IC, the use of probes and/or probe cards, and the like.The verification testing may be performed on intermediate structures aswell as the final structure. Additionally, the structures and methodsdisclosed herein may be used in conjunction with testing methodologiesthat incorporate intermediate verification of known good dies toincrease the yield and decrease costs.

Embodiments for forming a package structure are provided. The packagestructure may include a reflector, a waveguide and an optical componentover a substrate, and an optical fiber is configured to be connected tothe package structure. The reflector may include a metal layer, whichmay efficiently change directions of optical signals. As a result, aminimized and integrated package structure may be obtained.

FIGS. 1A-1B are cross-sectional representations of various stages offorming a first portion 100 a of a reflector, in accordance with someembodiments of the disclosure.

A first semiconductor layer 101 is provided, as shown in FIG. 1A inaccordance with some embodiments. The first semiconductor layer 101 mayinclude silicon. Alternatively or additionally, the first semiconductorlayer 101 may include elementary semiconductor materials, compoundsemiconductor materials, and/or alloy semiconductor materials. Examplesof the elementary semiconductor materials may include, but are notlimited to, crystal silicon, polycrystalline silicon, amorphous silicon,germanium, and/or diamond. Examples of the compound semiconductormaterials may include, but are not limited to, silicon carbide, galliumarsenide, gallium phosphide, indium phosphide, indium arsenide, and/orindium antimonide. Examples of the alloy semiconductor materials mayinclude, but are not limited to, SiGe, GaAsP, AlInAs, AlGaAs, GalnAs,GaInP, and/or GaInAsP.

Afterwards, openings 102 and 104 are formed in the first semiconductorlayer 101, as shown in FIG. 1A in accordance with some embodiments. Theopenings 102 and 104 may be formed by a procedure includingphotolithography patterning and etching processes. The photolithographypatterning processes may include photoresist coating (e.g., spin-oncoating), soft baking, mask aligning, exposure, post-exposure baking,developing the photoresist, rinsing, drying (e.g., hard baking), and/orother applicable processes. The etching processes may include dryetching, wet etching, and/or other etching methods (e.g., reactive ionetching (RIE)).

After the openings 102 and 104 are formed, a dielectric layer 105 isformed over a surface of the first semiconductor layer 101, as shown inFIG. 1B in accordance with some embodiments. More specifically, theopening 102 is filled by the dielectric layer 105 such that a firstalignment mark 107 is formed in the first semiconductor layer 101, whichis configured to provide an alignment function in the subsequentprocesses. In addition, a portion of the dielectric layer 105 is formedin the opening 104 such that a reduced opening 104′ is obtained.

In some embodiments, the dielectric layer 105 is formed by a thermaloxidation process. In some embodiments, the dielectric layer 105 isformed by a deposition process, which may include a chemical vapordeposition (CVD) process, a high-density plasma chemical vapordeposition (HDPCVD) process, an atomic layer deposition (ALD) process, aphysical vapor deposition (PVD) process, another applicable process, ora combination thereof. In some embodiments, the dielectric layer 105 ismade of silicon oxide, silicon nitride, silicon oxynitride, or anotherapplicable dielectric material. After the dielectric layer 105 isformed, the first portion 100 a of a reflector may be obtained.

FIGS. 2A-2D are cross-sectional representations of various stages offorming a second portion 200 of a reflector, in accordance with someembodiments of the disclosure.

A second semiconductor layer 201 is provided, as shown in FIG. 2A inaccordance with some embodiments. The second semiconductor layer 201 mayinclude silicon. Some materials used to form the second semiconductorlayer 201 may be similar to, or the same as, those used to form thefirst semiconductor layer 101 described previously and are not repeatedherein. It should be noted that, the second semiconductor layer 201includes a protruding portion 203, which may be formed by a procedureincluding photolithography patterning and etching processes. The detailsof the photolithography patterning and etching processes may be similarto, or the same as, those described previously and are not repeatedherein.

Next, an opening 202 is formed in the second semiconductor layer 201, asshown in FIG. 2B in accordance with some embodiments. Some processesused to form the opening 202 may be similar to, or the same as, thoseused to form the opening 102 described previously and are not repeatedherein.

Afterwards, a dielectric layer 205 is formed over a surface of thesecond semiconductor layer 201, as shown in FIG. 2C in accordance withsome embodiments. More specifically, the opening 202 is filled by thedielectric layer 205 such that a second alignment mark 207 is formed inthe second semiconductor layer 201, which is configured to provide analignment function in the subsequent processes. In addition, theprotruding portion 203 is conformally covered by the dielectric layer205. Some processes and materials used to form the dielectric layer 205may be similar to, or the same as, those used to form the dielectriclayer 105 described previously and are not repeated herein.

Then, a planarizing process is performed on the second semiconductorlayer 201 to expose the protruding portion 203, as shown in FIG. 2D inaccordance with some embodiments. In some embodiments, the planarizingprocess includes a grinding process, a chemical mechanical polishing(CMP) process, an etching process, another applicable process, or acombination thereof. After performing the planarizing process, thesecond portion 200 of a reflector may be obtained.

FIGS. 3A-3D are cross-sectional representations of various stages offorming a reflector 300 a, in accordance with some embodiments of thedisclosure.

The second portion 200 of FIG. 2D is turned upside down and then isbonded to the first portion 100 a of FIG. 1B, as shown in FIG. 3A inaccordance with some embodiments. In some embodiments, the dielectriclayer 205 of the second portion 200 faces the dielectric layer 105 ofthe first portion 100 a, and the second portion 200 is bonded to thefirst portion 100 a with the second alignment mark 207 aligned with thefirst alignment mark 107. Moreover, in some embodiments, the protrudingportion 203 is aligned with the reduced opening 104′ such that thereduced opening 104′ is covered by the protruding portion 203 of thesecond portion 200.

In some embodiments, the second portion 200 is bonded to the firstportion 100 a by a thermal process. During the thermal process, thedielectric layer 205 combined with the dielectric layer 105 such that acombined dielectric layer 305 is formed between the first portion 100 aand the second portion 200, and the reduced opening 104′ is enclosed bythe protruding portion 203 and the combined dielectric layer 305.

After the second portion 200 is bonded to the first portion 100 a, aplanarization process is performed on the second semiconductor layer201, as shown in FIG. 3B in accordance with some embodiments. It shouldbe noted that, the planarization process is performed until a desiredthickness of the second semiconductor layer 201 is obtained. The desiredthickness of the second semiconductor layer 201 will be described indetail later. In some embodiments, the planarizing process includes agrinding process, a chemical mechanical polishing (CMP) process, anetching process, another applicable process, or a combination thereof.

After performing the planarizing process, the second semiconductor layer201 is patterned to form an opening 308 in a patterned secondsemiconductor layer 201′, as shown in FIG. 3C in accordance with someembodiments. The opening 308 and the patterned second semiconductorlayer 201′ may be formed by a procedure including one or morephotolithography patterning and etching processes. The details of thephotolithography patterning and etching processes may be similar to, orthe same as, those described previously and are not repeated herein.

Afterwards, a metal layer 309 is formed lining the opening 308, and areduced opening 308′ is obtained, as shown in FIG. 3D in accordance withsome embodiments. As a result, a reflector 300 a is obtained. It shouldbe noted that, before the metal layer 309 is formed, the opening 308 hasa V-shaped cross-section with a tip pointing toward the combineddielectric layer 305. Therefore, the metal layer 309 lining the opening308 also has a tip 309T pointing along a direction from the patternedsecond semiconductor layer 201′ to the first semiconductor layer 101. Insome embodiments, the metal layer 309 is also V-shaped.

In some embodiments, the patterned second semiconductor layer 201′ has afirst surface facing the combined dielectric layer 305 and a secondsurface opposite to the first surface, and an angle θ₁ is formed betweenan extension line of the second surface of the patterned secondsemiconductor layer 201′ and a tilted sidewall 309 s of the metal layer309. It should be noted that, the tilted sidewall 309 s of the metallayer 309 is a portion of the interface between the metal layer 309 andthe patterned second semiconductor layer 201′. In some embodiments, theangle θ₁ is an acute angle.

In some embodiments, the angle θ₁ is in a range from about 40 degrees toabout 70 degrees. If the angle θ₁ is too small (i.e. smaller than 40degrees) or too large (i.e. greater than 70 degrees), the opticalsignals may not be efficiently transmitted to the desired destinationsafter being reflected by the metal layer 309.

In addition, the tip 309T is intersected by the tilted sidewall 309 sand another tilted sidewall 309 s′ of the metal layer 309. In someembodiments, an angle θ₂ is formed between the tilted sidewall 309 s′and an extension line of the second surface of the patterned secondsemiconductor layer 201′, which is opposite to the first surface facingthe combined dielectric layer 305.

In some embodiments, the angle θ₂ is in a range from about 40 degrees toabout 70 degrees, and the angle θ₂ between the tilted sidewall 309 s′and the second surface of the patterned second semiconductor layer 201′is substantially the same as, or similar to, the acute angle θ₁ betweenthe tilted sidewall 309 s and the second surface of the patterned secondsemiconductor layer 201′. Therefore, the reduced opening 308′ may have asymmetric cross-section.

In some embodiments, the reduced opening 104′ has a central axis 104 c,as shown in FIG. 3D in accordance with some embodiments. Since there isno optical path designed to be turned by the tilted sidewall 309 s′ ofthe metal layer 309, the tip 309T of the metal layer 309 is shifted fromthe central axis 104 c. However, in some embodiments, an optical path isdesigned to be turned by the tilted sidewall 309 s′ of the metal layer309. Thus, the tip 309T of the metal layer 309 is aligned with thecentral axis 104 c, which will be described in detail later.

In some embodiments, the metal layer 309 is formed by a procedureincluding deposition, photolithography patterning, and etchingprocesses. The deposition processes may include CVD, metal organic CVD(MOCVD), sputtering, or electroplating. The details of thephotolithography patterning and etching processes may be similar to, orthe same as, those described previously and are not repeated herein. Insome embodiments, the metal layer 309 is made of aluminum,aluminum/silicon/copper alloy, copper, titanium nitride, nickel,tungsten, metal silicide, or a combination thereof.

FIGS. 4A-4D are cross-sectional representations of various stages offorming a package structure 400 a, in accordance with some embodimentsof the disclosure. The package structure 400 a may be achip-on-wafer-on-substrate (CoWoS) package or another suitable package.

A package component 410 is provided, as shown in FIG. 4A in accordancewith some embodiments. In some embodiments, the package component 410 isan interposer or another suitable component. The interposer may besubstantially free of active elements, such as transistors, diodes, orother active elements. The interposer may include, or may besubstantially free of passive elements, such as capacitors, resistors,inductors, or other passive elements.

In some embodiments, the package component 410 includes a substrate 401,an insulating layer 403, and a semiconductor layer 405. In someembodiments, the substrate 401 is a wafer, such as a silicon wafer, andthe insulating layer 403 may be, for example, a buried oxide (BOX)layer, a silicon oxide layer, or the like. In addition, thesemiconductor layer 405 may be silicon, another elementary semiconductormaterial, or a compound semiconductor, and the semiconductor layer 405may be doped (e.g. with a P-type or an N-type dopant) or undoped.

In some embodiments, one or more through-substrate vias (TSVs) 408 areformed in the substrate 401. The TSVs 408 may be referred to asthrough-silicon vias. In some embodiments, each of the TSVs 408 includesan insulating layer 340 and a conductive feature 409 surrounded by theinsulating layer 340. The conductive features 409 are separated from thesubstrate 401 by the insulating layer 340. In some embodiments, theconductive features 409 include copper (Cu), aluminum (Al), nickel (Ni),platinum (Pt), lead-free solder (e.g., SnAg, SnCu, SnAgCu), anothersuitable conductive material, or a combination thereof.

Moreover, in some embodiments, conductive features 411 are formed over asurface of the substrate 401, which is opposite to the surface coveredby the insulating layer 403, and a passivation layer 413 is formed overthe conductive features 411. The conductive features 411 may bepartially exposed by openings 412 in the passivation layer 413, and theconductive features 411 may be in electrical contact with the TSVs 408.In addition, the conductive features 411 may be conductive pads orconductive lines, and the passivation layer 413 may be a multi-layerstructure.

An optical component 423 and an electronic component 425 are formed overthe semiconductor layer 405 of the package component 410, as shown inFIG. 4A in accordance with some embodiments. In some embodiments, theoptical component 423 includes a light emitting device such as a lightemitting diode or a laser, a light detecting device such as aphoto-sensor, an optical modulator, an optical coupler, anotherapplicable component, or a combination thereof.

In some embodiments, the electronic component 425 includes a transistor,a resistor, a capacitor, a diode, another applicable component, or acombination thereof. Although only one optical component 423 and oneelectronic component 425 are shown in FIG. 4A, the scope of thedisclosure is not limited thereto. For example, there can be more thanone optical component 423 and/or electronic component 425.

A waveguide 421 a is formed over the semiconductor layer 405 of thepackage component 410 and adjacent to the optical component 423, asshown in FIG. 4A in accordance with some embodiments. The waveguide 421a may include a core region and a cladding layer surrounding the coreregion, the core region and the cladding layer have different reflectivecoefficients and are arranged to allow an optical signal of apredetermined wavelength to travel within the core region by totalinternal reflection.

In some embodiments, the core region of the waveguide 421 a includes asemiconductor material such as silicon, a polymer material, a dielectricmaterial such as silicon nitride, or a combination thereof, and thecladding layer of the waveguide 421 a includes a dielectric materialsuch as silicon dioxide (SiO₂), silicon carbide (SiC), carbon nitride(CN), silicon oxynitride (SiON), silicon nitride (SiN), or anotherapplicable material.

In some embodiments, an interconnect structure 430 is formed over thewaveguide 421 a, the optical component 423 and the electronic component425. The interconnect structure 430 includes one or more redistributionlayers and one or more passivation layers. For example, the interconnectstructure 430 includes conductive layers 429 and conductive vias 427 ina passivation layer 431.

The passivation layer 431 may include multiple sub-layers. In someembodiments, the passivation layer 431 in the interconnect structure 430is made of polybenzoxazole (PBO), benzocyclobutene (BCB), silicone,acrylates, siloxane, another suitable material, or a combinationthereof. In some embodiments, the passivation layer 431 in theinterconnect structure 430 is made of non-organic materials. Thenon-organic materials includes silicon oxide, un-doped silicate glass,silicon oxynitride, solder resist (SR), silicon nitride, siliconcarbide, hexamethyldisilazane (HMDS), another suitable material, or acombination thereof.

In some embodiments, the conductive layers 429 and the conductive vias427 in the interconnect structure 430 are made of metal materials. Themetal materials include copper (Cu), Cu alloy, aluminum (Al), Al alloy,tungsten (W), W alloy, titanium (Ti), Ti alloy, tantalum (Ta), Ta alloy,another applicable material, or a combination thereof.

In addition, under-bump metallurgy (UBM) elements 435 are formed overthe passivation layer 431, a passivation layer 437 is formed over theUBM elements 435, and each of the UBM elements 435 is partially exposedby the passivation layer 437, as shown in FIG. 4A in accordance withsome embodiments. The UBM elements 437 may be made of titanium, titaniumnitride, tantalum, tantalum nitride, tungsten, titanium tungsten,nickel, gold, chrome, copper, copper alloy, another suitable material,or a combination thereof. Some materials used to form the passivationlayer 437 may be similar to, or the same as, those used to form thepassivation layer 431 described previously and are not repeated herein.

In some embodiments, a chip (integrated circuit die) 440 is bonded tothe interconnect structure 430 through conductive features 439, and theconductive features 439 are surrounded by a molding material 441. Theconductive features 439 may be conductive bumps or other conductiveelements, and the molding material 441 may include liquid epoxy,deformable gel, silicon rubber, another suitable material, or acombination thereof.

In some embodiments, the molding material 441 includes an epoxy-basedresin with fillers dispersed therein. The fillers may include insulatingfibers, insulating particles, other suitable elements, or a combinationthereof. In some embodiments, a dispensing process is performed to formthe molding material 441.

In some embodiments, the chip 440 is sawed from a wafer, and may be a“known-good-die”. In some embodiments, the chip 440 is a logic die, amemory die, or another applicable type of die. In some embodiments, thechip 440 includes a semiconductor substrate, passivation layer(s), andconductive feature(s).

In some embodiments, the chip 441 is disposed directly over theelectronic component 425 and the optical component 423, and a portion ofthe passivation layer 431 is removed such that an opening 432 is formedadjacent to the optical component 423, as shown in FIG. 4A in accordancewith some embodiments.

More specifically, in some embodiments, the waveguide 421 a remainscovered by the passivation layer 431 after the opening 432 is formed,and a portion of the opening 432 is directly above the waveguide 421 a.In some embodiments, a portion of the passivation layer 431 directlyabove the waveguide 421 a has a first thickness T₁, the waveguide 421 ahas a second thickness T₂, and a ratio (T₁/T₂) of the first thickness T₁to the second thickness T₂ is smaller than about 0.5.

If the ratio (T₁/T₂) is too large (i.e. greater than 0.5), the opticalsignals may not be efficiently transmitted (vibrated along a verticaldirection) to the waveguide 421 a. In some embodiments, the waveguide421 a is partially exposed by the opening 432.

Afterwards, the reflector 300 a shown in FIG. 3D is flipped upside downand then is bonded to the passivation layer 431, and the metal layer 309and the patterned second semiconductor layer 201′ are disposed in theopening 432, as shown in FIG. 4B in accordance with some embodiments. Insome embodiments, the reflector 300 a is bonded to the passivation layer431 by an adhesive layer 433, and the tilted sidewall 309 s faces thewaveguide 421 a.

After the reflector 300 a is bonded to the passivation layer 431, thereduced opening 308′ is enclosed by the metal layer 309 and thepassivation layer 431 such that a space A with triangular cross-sectionis formed, and the metal layer 309 has an inversed V-shapedcross-section. In some embodiments, the opening 432 is not entirelyfilled by the reflector 300 a, such that a gap is formed between thepatterned second semiconductor layer 201′ and the passivation layer 431,such as gaps 432 a and 432 b.

A molding material 445 is formed surrounding the reflector 300 a and thechip 440, and a planarizing process is performed on the reflector 300 aand the chip 440 such that a planarized reflector 300 a′ and aplanarized chip 440′ are formed, as shown in FIG. 4C in accordance withsome embodiments. More specifically, the reduced opening 104′ isreopened from the side opposite to the side facing the passivation layer431. Some materials used to form the molding material 445 may be similarto, or the same as, those used to form the molding material 441described previously and are not repeated herein.

After the planarizing process is performed, the package component 410 isbonded to a substrate 451 through bumps 455, as shown in FIG. 4D inaccordance with some embodiments. In some embodiments, the substrate 451is a printed circuit board (PCB), another package structure, or anothersuitable substrate. The bumps 455 are electrically connected toconductive features 453, such as conductive pads, over the substrate451. In some embodiments, the conductive features 453 and the bumps 455are substantially aligned to each other. As a result, a packagestructure 400 a is obtained.

FIG. 4E shows an application of the package structure 400 a of FIG. 4D,in accordance with some embodiments of the disclosure.

In some embodiments, the package structure 400 a is used for connectingwith an optical fiber 500, which includes a core region 501 and acladding layer 503 surrounding the core region 501, as shown in FIG. 4Ein accordance with some embodiments. Some materials used to form thecore region 501 and the cladding layer 503 may be similar to, or thesame as, those used to form the core region and the cladding layer ofthe waveguide 421 a described previously and are not repeated herein. Insome embodiments, the core region 501 of the optical fiber 500 isinserted into the reduced opening 104′ (as shown by the arrow pointingdownward), and an optical path between the optical fiber 500 and thewaveguide 421 a is formed.

More specifically, optical signals may be emitted from the optical fiber500, reflected (turned) by the tilted sidewall 309 s of the metal layer309, transmitted by the patterned second semiconductor layer 201′ andthe waveguide 421 a, and then, received by the optical component 423.Alternatively, optical signals may be emitted from the optical component423, transmitted by the waveguide 421 a and the patterned secondsemiconductor layer 201′, reflected (turned) by the tilted sidewall 309s of the metal layer 309, and then, received by the optical fiber 500.

In some embodiments, the patterned second semiconductor layer 201′ istransparent. Therefore, optical signals may be transmitted through thepatterned second semiconductor layer 201′. In addition, optical signalsmay be transformed to electronic signals and transmitted to theplanarized chip 440′ through the interconnect structure 430.Alternatively, optical signals may be transformed from electronicsignals, which is sent out from the planarized chip 440′ through theinterconnect structure 430.

In some embodiments, the portion of the patterned second semiconductorlayer 201′ under the combined dielectric layer has a third thickness T₃,and the reduced opening 104′ has a width W, the width W is greater thanthe third thickness T₃, and the third thickness T₃ is greater than thesecond thickness T₂ of the waveguide 421 a. It should be noted that thedifference between the width W and the second thickness T₂ of thewaveguide 421 a is large. Therefore, optical signals may be easily andefficiently transmitted between the large-sized reduced opening 104′ andthe small-sized waveguide 421 a.

In some embodiments, the width W is in a range from about 3 μm to about70 μm. In some embodiments, the third thickness T₃ is in a range fromabout 3 μm to about 5 μm. In some embodiments, the second thickness T₂of the waveguide 421 a is in a range from about 150 μm to about 250 μm.In addition, a fourth thickness T₄ of the portion of the combineddielectric layer 305 surrounding the reduced opening 104′ may be in arange from about 80 μm to about 250 μm.

Embodiments of the package structure 400 a includes the planarizedreflector 300 a′, which allow the optical fiber 500 to be connected tothe package structure 400 a by a self-aligned process. The planarizedreflector 300 a′ includes the metal layer 309, which can changedirections of optical signals. Therefore, the optical path in thepackage structure may not be limited by the guard rings or seal rings inthe package structure 400 a.

Moreover, optical signals can be easily and efficiently transmittedbetween two regions having a large size difference by the planarizedreflector 300 a′. As a result, the size of the package structure 400 amay be minimized, which allow more components to be integrated into agiven area in the package structure 400 a. Furthermore, the packagestructure 400 a may be a chip-on-wafer-on-substrate (CoWoS) package.Thus, a wafer-level test may be performed on the package structure 400a. In addition, the package structure 400 a is compatible with a systemof dense wavelength division multiplexing (DWDM).

FIG. 5 is a cross-sectional representation of a modified reflector 300b, in accordance with some embodiments of the disclosure. The modifiedreflector 300 b is similar to the reflector 300 a of FIG. 3D, and thedifference between FIG. 5 and FIG. 3D is that the tip 309T of the metallayer 309 is aligned with the central axis 104 c of the reduced opening104′ in FIG. 5 .

FIG. 6 shows an application of a modified package structure 400 b, inaccordance with some embodiments of the disclosure. FIG. 7A is aperspective representation of the space A in the package structure 400b, in accordance with some embodiments of the disclosure. FIG. 7B is aperspective representation of the space A in the package structure 400b, in accordance with some embodiments of the disclosure.

Some processes used to form the modified package structure 400 b may besimilar to, or the same as, those used to form the package structure 400a described previously and are not repeated herein. The differencebetween FIG. 6 and FIG. 4E is that the planarized reflector 300 a′ isreplaced by the planarized reflector 300 b′, and there is anotherwaveguide 421 b disposed in FIG. 6 . The planarized reflector 300 b′ isformed by the modified reflector 300 b shown in FIG. 5 .

In some embodiments, there are two waveguides 421 a and 421 b disposedat two opposite sides of the metal layer 309. Since the tip 309T of themetal layer 309 is aligned with the central axis 104 c of the reducedopening 104′, optical signals emitted from the optical fiber 500 may bereflected by the tip 309T of the metal layer 309, and split into twobeams of optical signals, which may be respectively transmitted to thewaveguide 421 a and the waveguide 421 b. Alternatively, optical signalsemitted from the waveguides 421 a and 421 b may be combined andreflected by the tip 309T of the metal layer 309, and then transmittedto the optical fiber 500.

In some embodiments, the space A enclosed by the metal layer 309 and thepassivation layer 431 is a triangular prism A₁, as shown in FIG. 7A.More specifically, one of the rectangle surfaces of the triangular prismA₁ faces the waveguides 421 a and 421 b. In these cases, optical signalsmay be split into two beams, or combined by two beams.

In some embodiments, the space A enclosed by the metal layer 309 and thepassivation layer 431 is a square pyramid A₂, as shown in FIG. 7B. Morespecifically, the square surface of the square pyramid A₂ faces thewaveguides 421 a and 421 b. In these cases, the number of the waveguidesdisposed in the package structure may be increased to four, and each ofthe waveguides is disposed facing each remaining surfaces of the squarepyramid A₂. Moreover, in these cases, optical signals may be split intofour beams, or combined by four beams. Embodiments of the packagestructure 400 b with the triangular prism A₁ or the square pyramid A₂give an advantage in high bandwidth applications since the signals maybe increased up to 4 times.

FIGS. 8A-8D are cross-sectional representations of various stages offorming a modified first portion 100 b of a reflector, in accordancewith some embodiments of the disclosure.

A first semiconductor layer 101 is provided, as shown in FIG. 8A inaccordance with some embodiments. Some materials used to form the firstsemiconductor layer 101 of FIG. 8A may be similar to, or the same as,those used to form the first semiconductor layer 101 of FIG. 1Adescribed previously and are not repeated herein. It should be notedthat, the first semiconductor layer 101 includes a protruding portion103, which may be formed by a procedure including photolithographypatterning and etching processes. The details of the photolithographypatterning and etching processes may be similar to, or the same as,those described previously and are not repeated herein.

Afterwards, openings 102, 106 and 108 are formed in the firstsemiconductor layer 101, as shown in FIG. 8B in accordance with someembodiments. Some processes used to form the openings 102, 106 and 108may be similar to, or the same as, those used to form the opening 102 ofFIG. 1A described previously and are not repeated herein. It should benoted that the openings 106 and 108 are formed at two opposite sides ofthe protruding portion 103.

After the openings 102, 106 and 108 are formed, a dielectric layer 105is formed over a surface of the first semiconductor layer 101, as shownin FIG. 8C in accordance with some embodiments. Moreover, the opening102 is filled by the dielectric layer 105 such that a first alignmentmark 107 is formed in the first semiconductor layer 101, which isconfigured to provide an alignment function in the subsequent processes.In addition, the openings 106 and 108 are filled by the dielectric layer105. Some processes and materials used to form the dielectric layer 105of FIG. 8C may be similar to, or the same as, those used to form thedielectric layer 105 of FIG. 1B described previously and are notrepeated herein.

Then, a planarizing process is performed on the first semiconductorlayer 101 to expose the protruding portion 103, as shown in FIG. 8D inaccordance with some embodiments. In some embodiments, the planarizingprocess includes a grinding process, a chemical mechanical polishing(CMP) process, an etching process, another applicable process, or acombination thereof. After performing the planarizing process, themodified first portion 100 b of a reflector may be obtained.

FIG. 8E is a cross-sectional representation of a modified reflector 300c, in accordance with some embodiments of the disclosure. The modifiedreflector 300 c is formed by bonding the second portion 200 of FIG. 2Dto the first portion 100 b of FIG. 8D, and a procedure similar to thesteps shown in FIGS. 3A-3D is performed to obtain the modified reflector300 c. The modified reflector 300 c is similar to the modified reflector300 b of FIG. 5 , and the difference between FIG. 8E and FIG. 5 is thatthe reduced opening 104′ is not formed in FIG. 8E.

FIG. 9 shows an application of a modified package structure 400 c, inaccordance with some embodiments of the disclosure. Some processes usedto form the modified package structure 400 c may be similar to, or thesame as, those used to form the package structure 400 a and are notrepeated herein.

In addition, the difference between FIG. 9 and FIG. 6 is that theplanarized reflector 300 b′ is replaced by the planarized reflector 300c′ in FIG. 9 . The planarized reflector 300 c′ is formed by the modifiedreflector 300 c shown in FIG. 8E.

The first semiconductor layer 101 of the planarized reflector 300 c′ maybe divided into an inner portion 101 a and an outer portion 101 b, whichmay be separated by a portion of the combined dielectric layer 305. Insome embodiments, the core region 501 of the optical fiber 500 isconnected to the inner portion 101 a by a self-aligned process, andoptical paths between the optical fiber 500 and the waveguides 421 a and421 b are formed.

More specifically, optical signals may be emitted from the optical fiber500, transmitted through the inner portion 101 a, reflected by the tip309T of the metal layer 309, transmitted by the patterned secondsemiconductor layer 201′ and the waveguide 421 a/421 b, and then,received by the optical component 423. Alternatively, optical signalsmay be emitted from the optical component 423, transmitted by thewaveguide 421 a/421 b and the patterned second semiconductor layer 201′,reflected by the tip 309T of the metal layer 309, transmitted by theinner portion 101 a, and then, received by the optical fiber 500.

In some embodiments, the inner portion 101 a and the patterned secondsemiconductor layer 201′ are transparent. Therefore, optical signals maybe transmitted through the inner portion 101 a and the patterned secondsemiconductor layer 201′.

FIG. 10 is a cross-sectional representation of a modified reflector 300d, in accordance with some embodiments of the disclosure. The modifiedreflector 300 d is similar to the modified reflector 300 b of FIG. 5 ,and the difference between FIG. 10 and FIG. 5 is that a polymer layer311 is formed in FIG. 10 .

It should be noted that, the polymer layer 311 may be formed over thepatterned second semiconductor layer 201′, the reduced opening 308′ ofFIG. 5 may be entirely filled by the polymer layer 311, and the metallayer 309 may be sandwiched between the patterned second semiconductorlayer 201′ and the polymer layer 311. In some embodiments, the polymerlayer 311 has a portion protruding toward the patterned secondsemiconductor layer 201′, and the protruding portion has a triangularcross-section. In some embodiments, the protruding portion is atriangular prism or a square pyramid in perspective representations, asshown in FIGS. 7A and 7B in accordance with some embodiments.

In some embodiments, the polymer layer 311 is formed by a procedureincluding dispensing, photolithography patterning and etching processes.In some embodiments, the polymer layer 311 is made of polybenzoxazole(PBO), liquid epoxy, deformable gel, silicon rubber, epoxy-based resin,another applicable polymer material, or a combination thereof.

FIG. 11 shows an application of a modified package structure 400 d, inaccordance with some embodiments of the disclosure. Some processes usedto form the modified package structure 400 d may be similar to, or thesame as, those used to form the package structure 400 a describedpreviously and are not repeated herein.

In addition, the difference between FIG. 11 and FIG. 6 is that theopening 432 (shown in FIG. 4A, not shown in FIG. 11 ) for bonding thereflector 300 d is formed deeper, and the planarized reflector 300 b′ isreplaced by the planarized reflector 300 d′ in FIG. 11 . The planarizedreflector 300 d′ is formed by the modified reflector 300 d shown in FIG.10 .

More specifically, the opening 432 for the reflector 300 d is formeddeeper such that the interconnect structure 430 is penetrated by theopening 432, and a portion of the package component 410 is removed. As aresult, the bottom surface of the planarized reflector 300 d′ (i.e. thebottom surface of the polymer layer 311) is lower than the top surfaceof the package component 410.

In some embodiments, the polymer layer 311 is configured to be a bufferlayer between the planarized reflector 300 d′ and the package component410, so that damage to the elements in the package component 410 may beprevented. In addition, the metal layer 309 of FIG. 11 is located lowerthan the metal layer 309 of FIG. 6 , in accordance with someembodiments, thereby ensuring that optical signals can transmit throughthe waveguides 421 a and 421 b.

FIG. 12 is a cross-sectional representation of a modified reflector 300e, in accordance with some embodiments of the disclosure. The modifiedreflector 300 e is similar to the modified reflector 300 c of FIG. 8E,and the difference between FIG. 12 and FIG. 8E is that a polymer layer311 is formed in FIG. 12 . Some materials used to form the polymer layer311 of FIG. 12 may be similar to, or the same as, those used to form thepolymer layer 311 of FIG. 10 described previously and are not repeatedherein.

FIG. 13 shows an application of a modified package structure 400 e, inaccordance with some embodiments of the disclosure. Some processes usedto form the modified package structure 400 e may be similar to, or thesame as, those used to form the package structure 400 a describedpreviously and are not repeated herein.

In addition, the difference between FIG. 13 and FIG. 9 is that theopening 432 (shown in FIG. 4A, not shown in FIG. 13 ) for bonding thereflector 300 e is formed deeper, and the planarized reflector 300 c′ isreplaced by the planarized reflector 300 e′ in FIG. 13 . The planarizedreflector 300 e′ is formed by the modified reflector 300 e shown in FIG.12 .

In some embodiments, the polymer layer 311 is configured to be a bufferlayer between the planarized reflector 300 e′ and the package component410, so that damage to the elements in the package component 410 may beprevented. In addition, the metal layer 309 of FIG. 13 is located lowerthan the metal layer 309 of FIG. 9 , in accordance with someembodiments, thereby ensuring that optical signals can transmit throughthe waveguides 421 a and 421 b.

Embodiments of the package structures 400 a, 400 b, 400 c, 400 d and 400e include the planarized reflectors 300 a′, 300 b′, 300 c′, 300 d′ and300 e′, which allow the optical fiber 500 to be connected to the packagestructures 400 a-400 e by a self-aligned process, and optical paths maybe formed between the optical fiber 500 and the waveguides 421 a and 421b. Moreover, since each of the planarized reflectors 300 a′-300 e′ has ametal layer 309 with an inversed V-shaped cross-section, optical signalsmay be efficiently reflected by the tilted sidewalls 309 s and 309 s′ ofthe inversed V-shaped cross-section. As a result, the optical paths maynot be limited by the components in the package structures 400 a-400 e,the space in the package structures 400 a-400 e may be effectivelyutilized, and the overall sizes of the package structures 400 a-400 emay be reduced. Furthermore, optical signals may be split up to fourbeams, which is advantageous for high bandwidth applications. Inaddition, by integrating the planarized reflectors 300 a′-300 e′ intothe package structures 400 a-400 e, optical signals may be easily andefficiently transmitted between two regions having a large sizedifference. As a result, the size of the package structures 400 a-400 emay be minimized, which allow more components to be integrated into agiven area in the package structures 400 a-400 e.

In some embodiments, a package structure is provided. The packagestructure includes a waveguide, a passivation layer, and a reflector.The waveguide is over a substrate. The passivation layer is over thesubstrate and covers the waveguide. The reflector includes a metal layerand a semiconductor layer on the passivation layer. The metal layer andthe first semiconductor layer are in contact with the passivation layer.

In some embodiments, a package structure is provided. The packagestructure includes a waveguide, a passivation layer, and a reflector.The waveguide is over a substrate. The passivation layer is over thesubstrate and covers the waveguide. The reflector includes a metal layerand a first semiconductor layer. The first semiconductor layer includesa first opening that overlaps the metal layer.

In some embodiments, a package structure is provided. The packagestructure includes a first dielectric layer, a second dielectric layer,a combined dielectric layer, and a reflector. The first dielectric layeris on a first semiconductor layer. The dielectric layer is on a secondsemiconductor layer. The combined dielectric layer includes the firstdielectric layer and the second dielectric layer. The reflector includesa metal layer on sidewalls of a portion of the first semiconductorlayer. The portion of the first semiconductor layer is V-shaped.

The foregoing outlines features of several embodiments so that thoseskilled in the art may better understand the aspects of the presentdisclosure. Those skilled in the art should appreciate that they mayreadily use the present disclosure as a basis for designing or modifyingother processes and structures for carrying out the same purposes and/orachieving the same advantages of the embodiments introduced herein.Those skilled in the art should also realize that such equivalentconstructions do not depart from the spirit and scope of the presentdisclosure, and that they may make various changes, substitutions, andalterations herein without departing from the spirit and scope of thepresent disclosure.

What is claimed is:
 1. A package structure, comprising: a waveguide overa substrate; a passivation layer over the substrate and covering thewaveguide; and a reflector comprising a metal layer and a semiconductorlayer on the passivation layer, wherein the metal layer and thesemiconductor layer are in contact with the passivation layer.
 2. Thepackage structure as claimed in claim 1, wherein a portion of thesemiconductor layer is disposed between the metal layer and thewaveguide.
 3. The package structure as claimed in claim 1, wherein thereflector further comprises an inner portion, an outer portion, and adielectric layer, and the inner portion and the outer portion areseparated from each other by the dielectric layer.
 4. The packagestructure as claimed in claim 3, wherein the inner portion overlaps themetal layer.
 5. The package structure as claimed in claim 3, wherein theinner portion is in contact with the semiconductor layer, and the outerportion is not in contact with the semiconductor layer.
 6. A packagestructure, comprising: a waveguide over a substrate; a passivation layerover the substrate and covering the waveguide; and a reflectorcomprising a metal layer and a first semiconductor layer, wherein thefirst semiconductor layer comprises a first opening that overlaps themetal layer.
 7. The package structure as claimed in claim 6, wherein atip of the metal layer is shifted from a central axis of the firstopening.
 8. The package structure as claimed in claim 6, wherein a tipof the metal layer is aligned with a central axis of the first opening.9. The package structure as claimed in claim 6, wherein the waveguidedoes not overlap the first opening.
 10. The package structure as claimedin claim 6, further comprising a chip on the passivation layer, whereina top surface of the chip is leveled with a top surface of the firstsemiconductor layer.
 11. The package structure as claimed in claim 6,wherein the reflector further comprises a second semiconductor layerdisposed between the first semiconductor layer and the metal layer. 12.The package structure as claimed in claim 11, wherein the secondsemiconductor layer comprises a second opening, and a width of thesecond opening is different from a width of the first opening.
 13. Thepackage structure as claimed in claim 12, wherein the width of thesecond opening is greater than the width of the first opening.
 14. Thepackage structure as claimed in claim 12, wherein a portion of thewaveguide overlaps the second opening.
 15. A package structure,comprising: a first dielectric layer on a first semiconductor layer; asecond dielectric layer on a second semiconductor layer; a combineddielectric layer comprising the first dielectric layer and the seconddielectric layer; and a reflector comprising a metal layer on sidewallsof a portion of the first semiconductor layer, wherein the portion ofthe first semiconductor layer is V-shaped.
 16. The package structure asclaimed in claim 15, wherein a width of the first semiconductor layer isless than a width of the second semiconductor layer.
 17. The packagestructure as claimed in claim 15, wherein the second semiconductor layercomprises a first opening and a second opening, a width of the firstopening is different from a width of the second opening, and the metallayer overlaps the second opening.
 18. The package structure as claimedin claim 17, wherein the first opening is completely filled with thesecond dielectric layer, and the second opening is partially filled withthe second dielectric layer.
 19. The package structure as claimed inclaim 18, further comprising a protruding portion on the firstsemiconductor layer, and the second opening is covered by the protrudingportion.
 20. The package structure as claimed in claim 17, wherein a tipof the metal layer is shifted from a central axis of the second opening.